PRODUCT & TECH

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WET System

生产Line为TFT,C/F面板的显影显影彩色图案玻璃设备(显影机),
湿清洁设备(清洁机)和湿蚀刻设备(玻璃蚀刻/消光)。

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  • Cleaner (Initial, Pre-Depo, Pre Photo, ITO)
    Basic Specifications - EUV, AQJ, Shower nozzles, Aqua knife, Air knife
    - Single & Double roll brush
    - Megasonic line shower (Option)
    Application - Cleaning the glass surface of TFT and Color Filter
    - Up to G10.5
    Product Inquiry inseok.h@stinc.co.kr
  • Cassette Cleaner
    Basic Specifications - Special wind jet nozzle (cleaning & drying)
    - Drying method : In-line type or hot blower type
    - Cassette rotation process
    - Chamber type : one chamber, two chambers, three chambers
    Application - Cleaning the glass surface of TFT and Color Filter
    - Up to G10.5
    Product Inquiry inseok.h@stinc.co.kr
  • Developer
    Basic Specifications - Slit type for TFT and Oscillation for Color Filter
    - Shower nozzles, Aqua knife, Air knife, HPWJ, IR Knife
    - Magnetic transfer/Partial tilting transfer
    - Recycle system of the developing chemical
    - Temp control of developing chemical < ±0.5℃
    - Automatic flow control
    Application - Cleaning the glass surface of TFT and Color Filter
    - Up to G10.5
    Product Inquiry inseok.h@stinc.co.kr
  • Glass Slimming System
    Basic Specifications - 1.4t → 0.8-0.4t
    - Good uniformity < 3%
    - Micro bubble system
    - Patent : Korea, Japan, Taiwan
    Application - Developing the glass surface of photo mask
    - Up to G10.5
    Product Inquiry inseok.h@stinc.co.kr
  • Stripper
    Basic Specifications - High pressure shower nozzles, Mega sonic, Aqua knife, Air knife
    - Magnetic transfer/Partial tilting transfer
    Application - Removing of photo resist
    - Up to G6.0
    Product Inquiry inseok.h@stinc.co.kr
  • Etcher
    Basic Specifications - Oscillation shower nozzles, Aqua knife, Air knife
    - Magnetic transfer/Partial tilting transfer
    Application - Patterning of metal layer (ITO, Moly, Al, Cu)
    - Up to G10.5
    Product Inquiry inseok.h@stinc.co.kr
Cleaner after glass grinding
Basic Specifications - Shower nozzle, Dual air knife
- Magnetic transfer/Partial tilting transfer
Application - Cleaning of glass particle after glass grinding
- Mobile size to TV size
Product Inquiry inseok.h@stinc.co.kr
Photo Mask Developer
Basic Specifications - Shower nozzle, Dual air knife
- Capable of multi mask size
Application - Developing the glass surface of photo mask
- Up to G6.0
Product Inquiry inseok.h@stinc.co.kr