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Cleaner (Initial, Pre-Depo, Pre Photo, ITO)

Basic Specifications

  • EUV, AQJ, Shower nozzles, Aqua knife, Air knife
  • Single & Double roll brush
  • Megasonic line shower (Option)

Application

  • Cleaning the glass surface of TFT and Color Filter
  • Up to G10.5

Cassette Cleaner

Basic Specifications

  • Special wind jet nozzle (cleaning & drying)
  • Drying method : In-line type or hot blower type
  • Cassette rotation process
  • Chamber type : one chamber, two chambers, three chambers

Application

  • Cleaning of cassette (Array, Cell, Panel)
  • Up to G10.5

Developer

Basic Specifications

  • Slit type for TFT and Oscillation for Color Filter
  • Shower nozzles, Aqua knife, Air knife, HPWJ, IR Knife
  • Magnetic transfer/Partial tilting transfer
  • Recycle system of the developing chemical
  • Temp control of developing chemical < ±0.5℃
  • Automatic flow control

Application

  • Cleaning of glass particle after glass grinding
  • Mobile size to TV size

Glass Slimming System

Basic Specifications

  • 1.4t → 0.8-0.4t
  • Good uniformity < 3%
  • Micro bubble system
  • Patent : Korea, Japan, Taiwan

Application

  • Developing the glass surface of photo mask
  • Up to G10.5

Stripper

Basic Specifications

  • High pressure shower nozzles, Aqua knife, Air knife
  • Magnetic transfer/Partial tilting transfer
  • Mega sonic

Application

  • Removing of photo resist
  • Up to G10.5

Etcher

Basic Specifications

  • Oscillation shower nozzles, Aqua knife, Air knife
  • Magnetic transfer/Partial tilting transfer

Application

  • Patterning of metal layer (ITO, Moly, Al, Cu)
  • Up to G10.5

Cleaner after glass grinding

Basic Specifications

  • Shower nozzle, Dual air knife
  • Magnetic transfer/Partial tilting transfer

Application

  • Cleaning of glass particle after glass grinding
  • Mobile size to TV size

상담신청


Photo Mask Developer

Basic Specifications

  • Shower nozzle, special Air Knife
  • Capable of multi mask size

Application

  • Developing the glass surface of photo mask
  • Up to G10.5

상담신청